Defect control refers to the methods and strategies used to identify, monitor, and mitigate imperfections or faults in materials and processes at the nanoscale. This concept is critical in ensuring the reliability and performance of nanostructures, especially in applications like nanoimprint lithography where the precision of features is essential for functionality. By managing defects effectively, researchers can enhance the quality of fabricated nanostructures, leading to improved device performance and longevity.
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