Micro and Nanoelectromechanical Systems
Through-silicon vias (TSVs) are vertical electrical connections that pass through a silicon wafer, enabling communication between different layers of integrated circuits. This technology is crucial in three-dimensional (3D) packaging, where multiple chips are stacked to enhance performance and reduce the footprint of electronic devices. TSVs facilitate shorter interconnect paths, lower power consumption, and improved signal integrity, which are essential in modern high-performance applications.
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