Micro and Nanoelectromechanical Systems
A silicon wafer is a thin, flat piece of silicon crystal used as a substrate for the fabrication of micro and nano devices. It serves as the foundational material in the production of integrated circuits and various microelectromechanical systems (MEMS) by providing a surface for the deposition of layers and structures essential for device functionality. The silicon wafer has become critical in the historical development of semiconductor technology and plays a significant role in advanced packaging techniques.
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