The resolution limit refers to the smallest distance between two points at which they can be distinguished as separate entities. In the context of nanolithography, this concept is critical because it directly impacts how small features can be reliably created and identified on a substrate. Achieving a better resolution limit means being able to produce finer details in structures, which is essential for advancing technologies in electronics, materials science, and biomedicine.
congrats on reading the definition of Resolution Limit. now let's actually learn it.